Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5690795 | Screwless shield assembly for vacuum processing chambers | Michael Rosenstein, Stephen Bruce Brodsky | 1997-11-25 |
| 5678980 | Robot assembly | Avi Tepman, Robert B. Lowrance | 1997-10-21 |
| 5656093 | Wafer spacing mask for a substrate support chuck and method of fabricating same | Vincent E. Burkhart, Michael Sugarman | 1997-08-12 |