Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656093 | Wafer spacing mask for a substrate support chuck and method of fabricating same | Vincent E. Burkhart, Howard Grunes | 1997-08-12 |
MS
Michael Sugarman
Overall (1997): #101,698 of 185,788Top 55%
1
Patents 1997