Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5678980 | Robot assembly | Howard Grunes, Robert B. Lowrance | 1997-10-21 |
| 5673167 | Support platen with removable insert useful in semiconductor processing apparatus | Robert E. Davenport | 1997-09-30 |
| D381030 | Sputtering target | — | 1997-07-15 |
| 5632873 | Two piece anti-stick clamp ring | Joseph Stevens, Roy Edwards | 1997-05-27 |