Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672385 | Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas | Hitoshi Jimba, So Won Kim | 1997-09-30 |
| 5660954 | Hologram and method of and apparatus for producing the same | Kazuhiro Suga, Kenji Ueda, Hiroyuki Nishimura | 1997-08-26 |
| 5594280 | Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means | Tsukasa Kobayashi, Shinji Takagi | 1997-01-14 |