Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5594280 | Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means | Atsushi Sekiguchi, Tsukasa Kobayashi | 1997-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5594280 | Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means | Atsushi Sekiguchi, Tsukasa Kobayashi | 1997-01-14 |