Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672385 | Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas | So Won Kim, Atsushi Sekiguchi | 1997-09-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672385 | Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas | So Won Kim, Atsushi Sekiguchi | 1997-09-30 |