Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5340261 | Load-lock unit and wafer transfer system | Teruo Asakawa, Kenji Nebuka, Hiroo Ono | 1994-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5340261 | Load-lock unit and wafer transfer system | Teruo Asakawa, Kenji Nebuka, Hiroo Ono | 1994-08-23 |