Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374147 | Transfer device for transferring a substrate | Tsutomu Hiroki | 1994-12-20 |
| 5357115 | Processing method for wafers | Tetsu Osawa, Noboru Hosaka | 1994-10-18 |
| 5340261 | Load-lock unit and wafer transfer system | Tetsu Oosawa, Kenji Nebuka, Hiroo Ono | 1994-08-23 |