Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5343047 | Ion implantation system | Shuji Kikuchi, Masayuki Tomoyasu, Naoki Takayama, Riki Tomoyoshi | 1994-08-30 |
| 5340261 | Load-lock unit and wafer transfer system | Tetsu Oosawa, Teruo Asakawa, Kenji Nebuka | 1994-08-23 |