Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5364222 | Apparatus for processing wafer-shaped substrates | Kazutoshi Yoshioka, Naruaki Iida | 1994-11-15 |
| 5361449 | Cleaning apparatus for cleaning reverse surface of semiconductor wafer | — | 1994-11-08 |
| 5339128 | Resist processing method | Kiyohisa Tateyama, Mitsuru Ushijima | 1994-08-16 |
| 5312487 | Coating apparatus | Akihiro Fujimoto, Haruo Iwatsu | 1994-05-17 |
| 5297910 | Transportation-transfer device for an object of treatment | Kazutoshi Yoshioka, Kenji Yokomizo, Yuji Yoshimoto | 1994-03-29 |