Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5327921 | Processing vessel for a wafer washing system | Shouri Mokuo, Osamu Tanaka | 1994-07-12 |
| 5297910 | Transportation-transfer device for an object of treatment | Kazutoshi Yoshioka, Masami Akimoto, Yuji Yoshimoto | 1994-03-29 |