Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5364222 | Apparatus for processing wafer-shaped substrates | Masami Akimoto, Naruaki Iida | 1994-11-15 |
| 5297910 | Transportation-transfer device for an object of treatment | Kenji Yokomizo, Masami Akimoto, Yuji Yoshimoto | 1994-03-29 |