Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5290656 | Resist composition, novel phenol compound and quinone diazide sulfonic acid ester of novel phenol compound | Yasunori Uetani, Makoto Hanabata, Hirotoshi Nakanishi, Yukio Hanamoto, Fumio Oi +1 more | 1994-03-01 |
| 5283324 | Process for preparing radiation sensitive compound and positive resist composition | Jun Tomioka, Hirotoshi Nakanishi, Hiroshi Takagaki, Yasunori Doi, Yasunori Uetani +1 more | 1994-02-01 |