Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5336583 | Positive quinonediazide resist composition utilizing mixed solvent of ethyl lactate and 2-heptanone | Yasunori Uetani, Yasunori Doi, Kazuhiko Hashimoto, Ryotaro Hanawa | 1994-08-09 |
| 5326665 | Positive type resist composition | Hiroshi Moriuma, Yasunori Uetani | 1994-07-05 |
| 5288587 | Radiation-sensitive positive resist composition comprising an o-quinone diazide, an alkali-soluble resin and a polyphenol compound | Yasunori Uetani | 1994-02-22 |