Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367404 | Image projection method and semiconductor device manufacturing method using the same | — | 1994-11-22 |
| 5345292 | Illumination device for projection exposure apparatus | Takahisa Shiozawa, Masato Muraki, Hiroyuki Ishii | 1994-09-06 |