Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5363170 | Illumination device and projection exposure apparatus using the same | — | 1994-11-08 |
| 5345292 | Illumination device for projection exposure apparatus | Takahisa Shiozawa, Hiroyuki Ishii, Shigeru Hayata | 1994-09-06 |