Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5345292 | Illumination device for projection exposure apparatus | Masato Muraki, Hiroyuki Ishii, Shigeru Hayata | 1994-09-06 |
TS
Takahisa Shiozawa
Overall (1994): #62,258 of 165,921Top 40%
1
Patents 1994