Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369655 | Output control method for laser system | Yasuaki Miyamoto, Shigeaki Kawakami, Makoto Hasegawa, Shigenori Fujiwara, Nobuteru Fujimura | 1994-11-29 |
| 5353116 | Defect inspection system for phase shift masks | Makoto Tanigawa, Hiroki Tabuchi, Hiroyuki Moriwaki | 1994-10-04 |
| 5330862 | Method for forming resist mask pattern by light exposure having a phase shifter pattern comprising convex forms in the resist | Hiroki Tabuchi, Katsuji Iguchi, Makoto Tanigawa, Hiroyuki Moriwaki | 1994-07-19 |