Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5353116 | Defect inspection system for phase shift masks | Hiroki Tabuchi, Hiroyuki Moriwaki, Takayuki Taniguchi | 1994-10-04 |
| 5330862 | Method for forming resist mask pattern by light exposure having a phase shifter pattern comprising convex forms in the resist | Hiroki Tabuchi, Katsuji Iguchi, Takayuki Taniguchi, Hiroyuki Moriwaki | 1994-07-19 |
| 5328871 | Manufacturing process for semiconductor device | Shingo Okazaki | 1994-07-12 |
| 5303199 | Redundant memory device having a memory cell and electrically breakable circuit having the same dielectric film | Hiroshi Ishihara | 1994-04-12 |