Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5353116 | Defect inspection system for phase shift masks | Makoto Tanigawa, Hiroki Tabuchi, Takayuki Taniguchi | 1994-10-04 |
| 5330862 | Method for forming resist mask pattern by light exposure having a phase shifter pattern comprising convex forms in the resist | Hiroki Tabuchi, Katsuji Iguchi, Makoto Tanigawa, Takayuki Taniguchi | 1994-07-19 |