Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5355569 | Method of making sensor | Jiri Marek, Helmut Baumann, Michael Offenberg, Martin Willmann | 1994-10-18 |
| 5324410 | Device for one-sided etching of a semiconductor wafer | Nils Kummer, Jiri Marek, Martin Willmann | 1994-06-28 |
| 5282926 | Method of anisotropically etching monocrystalline, disk-shaped wafers | Hans-Peter Trah | 1994-02-01 |