Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5375979 | Thermal micropump with values formed from silicon plates | — | 1994-12-27 |
| 5344117 | Micro-actuator | Gottfried Flik | 1994-09-06 |
| 5286341 | Process for producing micro-mechanical structures | — | 1994-02-15 |
| 5282926 | Method of anisotropically etching monocrystalline, disk-shaped wafers | Guenther Findler | 1994-02-01 |