Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5355569 | Method of making sensor | Helmut Baumann, Guenther Findler, Michael Offenberg, Martin Willmann | 1994-10-18 |
| 5353638 | Process for manufacturing micro-mechanical sensors | — | 1994-10-11 |
| 5324410 | Device for one-sided etching of a semiconductor wafer | Nils Kummer, Martin Willmann, Guenther Findler | 1994-06-28 |
| 5275047 | Rotation rate sensor | Erich Zabler | 1994-01-04 |