Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359785 | Substrate transport apparatus | Yoshiteru Fukutomi, Masami Ohtani | 1994-11-01 |
| 5308210 | Interface apparatus for transporting substrates between substrate processing apparatus | Masami Ohtani, Yoshiji Oka, Yoshiteru Fukutomi | 1994-05-03 |