Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308210 | Interface apparatus for transporting substrates between substrate processing apparatus | Masami Ohtani, Takeo Okamoto, Yoshiteru Fukutomi | 1994-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308210 | Interface apparatus for transporting substrates between substrate processing apparatus | Masami Ohtani, Takeo Okamoto, Yoshiteru Fukutomi | 1994-05-03 |