Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359785 | Substrate transport apparatus | Yoshiteru Fukutomi, Takeo Okamoto | 1994-11-01 |
| 5322079 | Substrate holding apparatus of a simple structure for holding a rotating substrate, and a substrate processing apparatus including the substrate holding apparatus | Yoshiteru Fukutomi, Yasushi Nakamura | 1994-06-21 |
| 5308210 | Interface apparatus for transporting substrates between substrate processing apparatus | Yoshiji Oka, Takeo Okamoto, Yoshiteru Fukutomi | 1994-05-03 |