Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374594 | Gas-based backside protection during substrate processing | Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart | 1994-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374594 | Gas-based backside protection during substrate processing | Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart | 1994-12-20 |