Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374594 | Gas-based backside protection during substrate processing | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1994-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374594 | Gas-based backside protection during substrate processing | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1994-12-20 |