Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374594 | Gas-based backside protection during substrate processing | Everhardus P. van de Ven, Jeffrey C. Benzing, Barry Chin, Christopher W. Burkhart | 1994-12-20 |
| 5346578 | Induction plasma source | Jeffrey C. Benzing, Kirkwood Rough | 1994-09-13 |