Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338626 | Fabrication of phase-shifting lithographic masks | Joseph Garofalo, Robert L. Kostelak, Jr., Sheila Vaidya | 1994-08-16 |
| 5308721 | Self-aligned method of making phase-shifting lithograhic masks having three or more phase-shifts | Joseph Garofalo | 1994-05-03 |
| 5288368 | Electron beam lithography with reduced charging effects | John J. DeMarco | 1994-02-22 |
| 5275896 | Single-alignment-level lithographic technique for achieving self-aligned features | Joseph Garofalo, Robert L. Kostelak, Jr., Sheila Vaidya | 1994-01-04 |