Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5358827 | Phase-shifting lithographic masks with improved resolution | Robert L. Kostelak, Jr., Sheila Vaidya | 1994-10-25 |
| 5338626 | Fabrication of phase-shifting lithographic masks | Robert L. Kostelak, Jr., Christophe Pierrat, Sheila Vaidya | 1994-08-16 |
| 5308721 | Self-aligned method of making phase-shifting lithograhic masks having three or more phase-shifts | Christophe Pierrat | 1994-05-03 |
| 5275896 | Single-alignment-level lithographic technique for achieving self-aligned features | Robert L. Kostelak, Jr., Christophe Pierrat, Sheila Vaidya | 1994-01-04 |