Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5373180 | Planar isolation technique for integrated circuits | Steven J. Hillenius, William T. Lynch, Lalita Manchanda, Mark R. Pinto | 1994-12-13 |
| 5358827 | Phase-shifting lithographic masks with improved resolution | Joseph Garofalo, Robert L. Kostelak, Jr. | 1994-10-25 |
| 5338626 | Fabrication of phase-shifting lithographic masks | Joseph Garofalo, Robert L. Kostelak, Jr., Christophe Pierrat | 1994-08-16 |
| 5320918 | Optical lithographical imaging system including optical transmission diffraction devices | Eric Raab, Donald L. White | 1994-06-14 |
| 5275896 | Single-alignment-level lithographic technique for achieving self-aligned features | Joseph Garofalo, Robert L. Kostelak, Jr., Christophe Pierrat | 1994-01-04 |