Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5336640 | Method of manufacturing a semiconductor device having an insulating layer composed of a BPSG film and a plasma-CVD silicon nitride film | — | 1994-08-09 |
| 5296037 | Plasma CVD system comprising plural upper electrodes | Kojiro Sugane | 1994-03-22 |
| 5290736 | Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric | Kyoji Tokunaga, Tomoharu Katagiri, Tsuyoshi Hashimoto, Tomohiro Ohta | 1994-03-01 |