Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5290736 | Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric | Nobuyoshi Sato, Tomoharu Katagiri, Tsuyoshi Hashimoto, Tomohiro Ohta | 1994-03-01 |