Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308651 | Photochemical vapor deposition process | Hiroaki Sasaki, Tohru Mitomo, Naoki Kubota | 1994-05-03 |
| 5305519 | Multilevel interconnect structure and method of manufacturing the same | Hiroshi Yamamoto | 1994-04-26 |
| 5300321 | Process for depositing titanium nitride film by CVD | Tadashi Nakano | 1994-04-05 |
| 5290736 | Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric | Nobuyoshi Sato, Kyoji Tokunaga, Tomoharu Katagiri, Tsuyoshi Hashimoto | 1994-03-01 |