Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368685 | Dry etching apparatus and method | Kazunori Tsujimoto, Shinichi Tachi | 1994-11-29 |
| 5354418 | Method for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1994-10-11 |
| 5318667 | Method and apparatus for dry etching | Kazunori Tsujimoto, Shinichi Tachi | 1994-06-07 |