Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368685 | Dry etching apparatus and method | Takao Kumihashi, Shinichi Tachi | 1994-11-29 |
| 5354416 | Dry etching method | Sadayuki Okudaira, Shinichi Tachi | 1994-10-11 |
| 5354418 | Method for dry etching | Takao Kumihashi, Shinichi Tachi | 1994-10-11 |
| 5318667 | Method and apparatus for dry etching | Takao Kumihashi, Shinichi Tachi | 1994-06-07 |