Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368685 | Dry etching apparatus and method | Takao Kumihashi, Kazunori Tsujimoto | 1994-11-29 |
| 5354416 | Dry etching method | Sadayuki Okudaira, Kazunori Tsujimoto | 1994-10-11 |
| 5354418 | Method for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1994-10-11 |
| 5343353 | Semiconductor device and process of producing the same | Hiroshi Miki, Yuzuru Ohji, Keiichi Kanehori | 1994-08-30 |
| 5318667 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1994-06-07 |