Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338647 | Reflection type photomask and reflection type photolithography method comprising a concavo-convex surface | Kenji Nakagawa | 1994-08-16 |
| 5276334 | Charged particle beam exposure method and apparatus | Akio Yamada, Kiichi Sakamoto | 1994-01-04 |