Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338939 | Charged particle beam exposure including a heat blocking partition positioned near deflecting coils | Akio Yamada, Yoshihisa Oae, Hiroshi Yasuda | 1994-08-16 |
HN
Hisayasu Nishino
Overall (1994): #124,980 of 165,921Top 80%
1
Patents 1994