Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5361122 | Autofocusing device and projection exposure apparatus with the same | Yoshiharu Kataoka, Yuichi Yamada | 1994-11-01 |
| 5359407 | Optical scanning apparatus, surface-state inspection apparatus and exposure apparatus | Michio Kohno | 1994-10-25 |
| 5331371 | Alignment and exposure method | Tetsuya Mori | 1994-07-19 |
| 5309197 | Projection exposure apparatus | Tetsuya Mori, Hideki Ina | 1994-05-03 |
| 5305054 | Imaging method for manufacture of microdevices | Miyoko Noguchi | 1994-04-19 |