Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5361122 | Autofocusing device and projection exposure apparatus with the same | Akiyoshi Suzuki, Yuichi Yamada | 1994-11-01 |
| 5323016 | Focusing method | Yuichi Yamada, Hiroyoshi Kubo, Haruna Kawashima | 1994-06-21 |