Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5331371 | Alignment and exposure method | Akiyoshi Suzuki | 1994-07-19 |
| 5309197 | Projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina | 1994-05-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5331371 | Alignment and exposure method | Akiyoshi Suzuki | 1994-07-19 |
| 5309197 | Projection exposure apparatus | Akiyoshi Suzuki, Hideki Ina | 1994-05-03 |