Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5308417 | Uniformity for magnetically enhanced plasma chambers | David W. Groechel, Masato Toshima, Robert Steger, Jerry Wong, Tetsuya Ishikawa +2 more | 1994-05-03 |
TS
Tetsuhiko Sambei
Overall (1994): #61,052 of 165,921Top 40%
1
Patents 1994