Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4849608 | Apparatus for heat-treating wafers | Yusuke Muraoka, Atsushi Tamada, Takamasa Sakai, Hitoshi Haibara | 1989-07-18 |
| 4813450 | Fluid pressure control valve | Ichiro Ishiwata | 1989-03-21 |
| 4803948 | Heat processing apparatus for semiconductor manufacturing | Ikuyoshi Nakatani, Takamasa Sakai, Yusuke Muraoka | 1989-02-14 |