Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4849608 | Apparatus for heat-treating wafers | Yusuke Muraoka, Atsushi Tamada, Takamasa Sakai, Keiji Nakagawa | 1989-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4849608 | Apparatus for heat-treating wafers | Yusuke Muraoka, Atsushi Tamada, Takamasa Sakai, Keiji Nakagawa | 1989-07-18 |