Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4883424 | Apparatus for heat treating substrates | Yuusuke Muraoka | 1989-11-28 |
| 4849608 | Apparatus for heat-treating wafers | Yusuke Muraoka, Atsushi Tamada, Hitoshi Haibara, Keiji Nakagawa | 1989-07-18 |
| 4803948 | Heat processing apparatus for semiconductor manufacturing | Keiji Nakagawa, Ikuyoshi Nakatani, Yusuke Muraoka | 1989-02-14 |
| 4798926 | Method of heating semiconductor and susceptor used therefor | — | 1989-01-17 |