Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4849608 | Apparatus for heat-treating wafers | Atsushi Tamada, Takamasa Sakai, Hitoshi Haibara, Keiji Nakagawa | 1989-07-18 |
| 4803948 | Heat processing apparatus for semiconductor manufacturing | Keiji Nakagawa, Ikuyoshi Nakatani, Takamasa Sakai | 1989-02-14 |