Issued Patents 1989
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4890245 | Method for measuring temperature of semiconductor substrate and apparatus therefor | Masahiko Yomoto, Hajime Ichikawa, Shigeru Kato | 1989-12-26 |
| 4859832 | Light radiation apparatus | Hajime Ichikawa, Masahiko Yomoto, Shigeru Kato | 1989-08-22 |
| 4798962 | Multi-wavelength projection exposure and alignment apparatus | Koichi Matsumoto, Yutaka Suenaga, Kiyoyuki Muramatsu | 1989-01-17 |
| 4795244 | Projection type exposure apparatus | Koichi Matsumoto, Yutaka Suenaga, Kiyoyuki Muramatsu | 1989-01-03 |