Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4798962 | Multi-wavelength projection exposure and alignment apparatus | Koichi Matsumoto, Makoto Uehara, Kiyoyuki Muramatsu | 1989-01-17 |
| 4795244 | Projection type exposure apparatus | Makoto Uehara, Koichi Matsumoto, Kiyoyuki Muramatsu | 1989-01-03 |